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东丽道康宁推出150mm SiC晶圆
无锡普罗图斯机电科技有限公司 / 2011-01-29
无锡普罗图斯机电科技有限公司 / 2011-01-29
东丽道康宁推出150mm SiC晶圆，明确提出致命缺陷标准
东丽道康宁于2014年9月18日发布了口径为150mm（6英寸）的SiC晶圆产品。将根据影响SiC功率元件性能的“致命缺陷”密度，分三个等级销售。该公司提出了表示致命缺陷多寡的指标——“微管密度（MPD）”、“贯通螺旋位错密度（TSD）”及“基面位错密度（BPD）”。该公司表示，这是业内首次针对6英寸SiC晶圆明确提出这3项指标。
产品将分为“Prime Standard”、“Prime Select”和“Prime Ultra”三个等级。Prime Standard级保证MPD不超过1个/cm2，适合额定电流小的SiC肖特基势垒二极管（SBD）以及结势垒肖特基（JBS）二极管。
Prime Select级保证MPD不超过1个/cm2，TSD不超过300个/cm2。3个等级中，结晶品质最高的是Prime Ultra级，保证MPD不超过1个/cm2，TSD不超过200个/cm2，BPD不超过3000个/cm2，适合SiC制MOSFET、JFET、IGBT、BJT及PiN二极管等。由于品质高，所以容易设计耐压超过3.3kV的高耐压SiC功率元件。
产品将分为“Prime Standard”、“Prime Select”和“Prime Ultra”三个等级。Prime Standard级保证MPD不超过1个/cm2，适合额定电流小的SiC肖特基势垒二极管（SBD）以及结势垒肖特基（JBS）二极管。
Prime Select级保证MPD不超过1个/cm2，TSD不超过300个/cm2。3个等级中，结晶品质最高的是Prime Ultra级，保证MPD不超过1个/cm2，TSD不超过200个/cm2，BPD不超过3000个/cm2，适合SiC制MOSFET、JFET、IGBT、BJT及PiN二极管等。由于品质高，所以容易设计耐压超过3.3kV的高耐压SiC功率元件。
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